1600c CVD Tube Furnace System for Deposition of Carbon and Metal Oxidize

Customization: Available
After-sales Service: Yes
Warranty: One Year

Product Description

Basic Specifications
Model NO. CY-1600X-III-HVC
Structure Desktop
Material Steel
Certification CE Certified
Application Laboratory Research
Processing Tube High Purity Alumina
Heating Rate 1-15°C/Min.
Gas System Mass Flow Meter
Product Description

1600C CVD Tube Furnace System

The CVD-1600X-III-HVC series furnace workstation is designed for the deposition of Carbon and metal Oxidize. It consists of a 1600X-III series three-zone tube furnace, a precision mass flow gas control station, and a high vacuum station.

Max Temperature: 1600°C for high-performance thermal processing.
Vacuum Rate: Achieves up to 10^-5 torr with professional sealing assembly.
Versatility: Competent for CVD, Diffusion, and other thermo-treatments under vacuum or shielding gas.
Technical Specifications
Component Feature Detail
Tube Furnace Unit Casing Double layer steel casing with air cooling; automatic cooling when case > 55°C.
Heating Element MoSi2 Heating element
Temperature Control Three precision controllers for separate zone management; 30-step PID programmable.
Heating Zone Total 600mm (220mm + 200mm + 200mm).
High Vacuum Station Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (leak-free)
Gas Control MFC Structure 3 channel MFC made of 316 stainless steel; 0~500SCCM range.
Product Gallery
CVD Tube Furnace Front View
CVD Tube Furnace System Setup
Control Interface
Packaging & Delivery
Safe Wooden Box Packaging
Our Service & Terms
🛠️ Maintenance

One year free-of-charge maintenance for equipment.

🚚 Delivery

Fast and flexible shipping via sea, air, or express.

💳 Payment

Supports T/T, L/C, PayPal, and Western Union.

⏱️ Response

Quick technical support within 24 hours.

Product Certification and Overview
Frequently Asked Questions
What is the maximum working temperature of the CVD furnace?
The system features a maximum heating temperature of 1600°C, with a continuous working temperature of 1500°C.
How many heating zones does this model have?
This is a three-zone tube furnace with a total heating length of 600mm, allowing for precise temperature gradient control.
What level of vacuum can the system reach?
With the high vacuum station provided, the ultimate pressure can reach less than 1E-8 mbar under leak-free conditions.
Is the gas flow adjustable?
Yes, the system includes a 3-channel Mass Flow Controller (MFC) made of 316 stainless steel with a flow range of 0~500SCCM per channel.
What safety features are included in the furnace casing?
It uses a double-layer steel casing with air cooling and a built-in thermostat that automatically activates cooling when the case temperature exceeds 55°C.
What materials is the processing tube made of?
The processing tube is made from 99.8% high-purity alumina, ensuring excellent thermal stability and chemical resistance.

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